This study constructed a framework for monitoring equipment performances from critical tool groups to single machines via longitudinal analysis. In addition, rather than evaluating OEE for a fixed period of observation time, we also proposed a mechanism with statistical efficiency control charts to continuously monitor OGE over time. ![]() This study aims to propose overall tool group efficiency (OGE) indices to observe the equipment performance at the tool group level. However, there are limitations for evaluating only OEE of single machine in semiconductor manufacturing. Overall equipment efficiency (OEE) has been proposed as a comprehensive index for individual equipment performance.
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